Keywords: design, integrated circuits, technological process,
THE ANALYSIS OF TECHNOLOGY OF PRODUCTION OF BASIC TYPES OF STRUCTURES OF INTEGRAL SCHEMES
UDC 681.335
This paper discusses the features of technological processes in the design of microelectronic products. It is illustrated how microelectronic structures are formed.
Keywords: design, integrated circuits, technological process,
For citation: Korosteleva N.A. , Komaristaya K.O. , Kostrova V.N. , THE ANALYSIS OF TECHNOLOGY OF PRODUCTION OF BASIC TYPES OF STRUCTURES OF INTEGRAL SCHEMES. Bulletin of the Voronezh Institute of High Technologies. 2019;13(3). Available from: https://vestnikvivt.ru/ru/journal/pdf?id=957 (In Russ).
Published 30.09.2019